International conference on spectroscopic ellipsometry 0001: proceedings vol 0001 : Paris, 11.01.93-14.01.93.
spectroscopic ellipsometry :
Saved in:
Personal Name(s): | Boccara, A. C., editor |
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Imprint: |
Lausanne :
Elsevier Sequoia,
1993.
|
Physical Description: |
X, 306 S. |
Note: |
englisch |
Series Title: |
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Thin solid films ;
vol 0233. |
Subject (ZB): | |
Classification: |
LEADER | 01009nas a2200277 n 4500 | ||
---|---|---|---|
001 | 138339 | ||
005 | 19970520000000.0 | ||
008 | r1993 | ||
035 | |a (Sirsi) a1078 | ||
084 | 0 | |a FJNC - Optical spectroscopy in solids |2 ZB | |
245 | 0 | 0 | |a International conference on spectroscopic ellipsometry 0001: proceedings vol 0001 : |b Paris, 11.01.93-14.01.93. |
260 | |a Lausanne : |b Elsevier Sequoia, |c 1993. | ||
300 | |a X, 306 S. | ||
490 | 0 | |a Thin solid films ; |v vol 0233. | |
500 | |a englisch | ||
520 | |a spectroscopic ellipsometry : | ||
520 | |a reflectance anisotropy | ||
520 | |a roughness, electrochemistry | ||
520 | |a semiconductors and microelectronics | ||
520 | |a in situ characterization, nucleation and growth | ||
596 | |a 10 | ||
650 | 4 | |a ellipsometry | |
700 | 1 | |a Boccara, A. C., |e Hrsg. | |
900 | |a Z 003066-0233 | ||
908 | |a Konferenz | ||
949 | |a Z 003066-0233 |w LC |c 1 |i 9900003730 |d 12/12/2002 |l STACKS |m IBN-1-2 |r Y |s Y |t PR |u 25/3/2009 |x INST-F |1 PRINT |2 KONFERENZ |