Physical chemistry of, in and on silicon.
physical chemistry of, in, and on silicon :
Saved in:
Personal Name(s): | Cerofolini, G. F. |
---|---|
Meda, L. | |
Imprint: |
Berlin :
Springer,
1989.
|
Physical Description: |
VIII, 122 S. |
Note: |
englisch |
ISBN: |
9780387190495 9783540190493 354019049X 038719049X |
Series Title: |
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Springer series in materials science ;
8. |
Classification: | |
Shelf Classification: |
LEADER | 01785cam a2200493 n 4500 | ||
---|---|---|---|
001 | 124792 | ||
005 | 20050214191100.0 | ||
008 | r1989 | ||
020 | |a 354019049X | ||
020 | |a 038719049X | ||
035 | |a (Sirsi) a110965 | ||
084 | 0 | |a CHGE - Physical chemistry of inorganic compounds - incl. physical properties |2 ZB | |
084 | 0 | |a CHG - Physical chemistry - general aspects |2 ZB | |
084 | 0 | |a FJKB - Elemental semiconductors |2 ZB | |
084 | 0 | |a FFPE - Thin film electronic properties, semiconductor interfaces |2 ZB | |
084 | 1 | |a CHG - Physikalische Chemie - Allgemeines |2 LS | |
084 | 1 | |a FJK - Halbleitermaterialien |2 LS | |
245 | 0 | 0 | |a Physical chemistry of, in and on silicon. |
260 | |a Berlin : |b Springer, |c 1989. | ||
300 | |a VIII, 122 S. | ||
490 | 0 | |a Springer series in materials science ; |v 8. | |
500 | |a englisch | ||
520 | |a physical chemistry of, in, and on silicon : | ||
520 | |a preparation | ||
520 | |a silicon phases | ||
520 | |a equilibrium defects | ||
520 | |a impurities | ||
520 | |a dopants | ||
520 | |a defect impurity interactions | ||
520 | |a impurities | ||
520 | |a the high density limit | ||
520 | |a surfaces and interfaces | ||
520 | |a gettering | ||
520 | |a device processing | ||
596 | |a 1 90 | ||
700 | 1 | |a Cerofolini, G. F. | |
700 | 1 | |a Meda, L. | |
900 | |a CHG 012 | ||
900 | |a S 005950-0008'01' | ||
900 | |a FJK 013 | ||
908 | |a Lehrbuch | ||
949 | |a CHG 012 |w LC |c 1 |i 1089103494 |d 14/2/2005 |l STACKS |m ZB |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-C |1 PRINT |2 HB | ||
949 | |a FJK 013 |w LC |c 1 |i 1089103834 |d 13/5/2008 |e 14/4/2008 |l STACKS |m ZB |n 1 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |2 HB | ||
949 | |a S 005950-0008'01' |w LC |c 1 |i 1089105231 |d 1/7/2002 |l STACKS |m IEK-5 |r Y |s Y |t INSTB |u 25/3/2009 |x INST-F |1 PRINT |2 HB |