Introduction to microelectronic fabrication / Richard C. Jaeger.
Introduction to microelectronic fabrication :
Saved in:
Personal Name(s): | Jaeger, Richard C. |
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Imprint: |
Reading, MA :
Addison Wesley,
1988.
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Physical Description: |
XIII, 232 S. |
Note: |
englisch |
ISBN: |
9780201146950 0201146959 |
Series Title: |
Modular series on solid state devices ;
5. |
Classification: | |
Shelf Classification: |
ZB | |
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