Untersuchung mechanischer Eigenschaften von a-C:H- und a-SI :H-Schichten mittels Brillouin-Streuung und Nanoindenter / von Xin Jiang
study of mechanical properties of amorphous hydrogenated carbon and silicon layers by brillouin scattering and nanoindenter
Saved in:
Personal Name(s): | Jiang, Xin, author |
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Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1990
|
Physical Description: |
92 Seiten, Anhang |
Note: |
deutsch |
Series Title: |
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Berichte des Forschungszentrums Jülich
2397 |
Dissertation Note: |
Zugleich: Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen
|
Keywords: |
diamondlike carbon film |
Subject (ZB): | |
Classification: |
LEADER | 01518cam a2200373 n 4500 | ||
---|---|---|---|
001 | 132707 | ||
008 | r1990 ger | ||
035 | |a (Sirsi) a117909 | ||
035 | |a (Sirsi) 132707 | ||
041 | |a ger | ||
084 | 0 | |a FPUG - Special purpose coatings | |
084 | 0 | |a FJEC - Amorphous semiconductors | |
084 | 0 | |a FPQ - Surface friction, hardness, wear, lubrication | |
084 | 0 | |a FJNC - Optical spectroscopy in solids | |
100 | 1 | |a Jiang, Xin, |e Verfasser | |
245 | 0 | 0 | |a Untersuchung mechanischer Eigenschaften von a-C:H- und a-SI :H-Schichten mittels Brillouin-Streuung und Nanoindenter / |c von Xin Jiang |
264 | |a Jülich : |b Forschungszentrum, Zentralbibliothek, |c 1990 | ||
300 | |a 92 Seiten, Anhang | ||
336 | |a Text |b txt |2 rdacontent | ||
337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
338 | |a Band |b nc |2 rdacarrier | ||
490 | 0 | |a Berichte des Forschungszentrums Jülich |v 2397 | |
500 | |a deutsch | ||
502 | |a Zugleich: Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen | ||
520 | |a study of mechanical properties of amorphous hydrogenated carbon and silicon layers by brillouin scattering and nanoindenter | ||
650 | 4 | |a amorphous silicon | |
650 | 4 | |a diamond film | |
650 | 4 | |a mechanical properties | |
650 | 4 | |a hardness | |
650 | 4 | |a Brillouin scattering | |
653 | |a diamondlike carbon film | ||
901 | |a JUEL-2397 | ||
596 | |a 46 | ||
949 | |a JUEL-2397 |w LC |c 1 |i 6133207926 |d 11/12/2002 |l STACKS |m PTJ |r Y |s Y |t INSTHS |u 25/3/2009 |x INST-F |1 PRINT |2 HS |