Quantitative Augerelektronenspektroskopie zur Tiefenprofilanalyse von Schichtsystemen am Beispiel von Silizium nach Nickelimplantation / A. Schoenborn
quantitative auger electron spectroscopy for depth profiling of implanted nickel in silicon
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Personal Name(s): | Schoenborn, A. |
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Imprint: |
Düsseldorf :
VDI-Verl.,
1991
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Physical Description: |
134 S. |
Note: |
deutsch |
ISBN: |
3181435058 9783181435052 |
Series Title: |
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Fortschritt-Berichte VDI. Reihe 5. Grund- und Werkstoffe ;
235 |
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ZB | |
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Open Stacks Call number: S 000173-0235'01' Barcode: 1093100664 Available |