Metal impurities in silicon-device fabrication.
Metal impurities in silicon device fabrication :
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| Personal Name(s): | Graff, Klaus. |
|---|---|
| Imprint: |
Berlin :
Springer,
1995.
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| Physical Description: |
IX, 216 S. |
| Note: |
englisch |
| ISBN: |
9780387583174 0387583173 9783540583172 3540583173 |
| Series Title: |
Springer series in materials science ;
24. |
| Subject (ZB): | |
| Classification: |
| ZB | |
|---|---|
Open Stacks  Call Number: S 005950-0024'01' Barcode: 1094104385
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