Metal impurities in silicon-device fabrication.
Metal impurities in silicon device fabrication :
Saved in:
Personal Name(s): | Graff, Klaus. |
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Imprint: |
Berlin :
Springer,
1995.
|
Physical Description: |
IX, 216 S. |
Note: |
englisch |
ISBN: |
9780387583174 0387583173 9783540583172 3540583173 |
Series Title: |
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Springer series in materials science ;
24. |
Subject (ZB): | |
Classification: |
LEADER | 01739cam a2200445 n 4500 | ||
---|---|---|---|
001 | 141101 | ||
005 | 20000317111400.0 | ||
008 | r1995 | ||
020 | |a 3540583173 | ||
020 | |a 0387583173 | ||
035 | |a (Sirsi) a125370 | ||
084 | 0 | |a FJHE - Defects and radiation effects in semiconductors |2 ZB | |
245 | 0 | 0 | |a Metal impurities in silicon-device fabrication. |
260 | |a Berlin : |b Springer, |c 1995. | ||
300 | |a IX, 216 S. | ||
490 | 0 | |a Springer series in materials science ; |v 24. | |
500 | |a englisch | ||
520 | |a Metal impurities in silicon device fabrication : | ||
520 | |a (physical principles and properties of transition metal impurities dissolved or precipitated in monocrystalline silicon, intended as an introduction to the field of defect engineering for the fabrication of modern electronic devices) | ||
520 | |a common properties of transition metals | ||
520 | |a properties of transition metals in silicon | ||
520 | |a properties of the main impurities | ||
520 | |a properties of rare impurities | ||
520 | |a detection methods | ||
520 | |a requirements of modern technology | ||
520 | |a gettering of impurities | ||
520 | |a future trends | ||
520 | |a Appendix: | ||
520 | |a table of activation energies and majority carrier cross sections of transition metals | ||
596 | |a 1 | ||
650 | 4 | |a semiconductor | |
650 | 4 | |a silicon | |
650 | 4 | |a crystal defect | |
650 | 4 | |a impurity | |
650 | 4 | |a semiconductor device | |
650 | 4 | |a fabrication | |
700 | 1 | |a Graff, Klaus. | |
900 | |a S 005950-0024'01' | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a S 005950-0024'01' |w LC |c 1 |i 1094104385 |d 17/3/2000 |e 9/11/1998 |l STACKS |m ZB |n 1 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |