Charakterisierung dünner Schichten / Hermann Jehn ; Georg Reiners ; Norbert Siegel.
Characterization of thin films :
Saved in:
Personal Name(s): | Jehn, Hermann. |
---|---|
Reiners, Georg. / Siegel, Norbert. | |
Imprint: |
Berlin :
Beuth,
1993.
|
Physical Description: |
245 S. |
Note: |
deutsch |
ISBN: |
3410130381 9783410130383 |
Series Title: |
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DIN-Fachbericht ;
39. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
LEADER | 01472cam a2200433 n 4500 | ||
---|---|---|---|
001 | 141270 | ||
005 | 20000225151700.0 | ||
008 | r1993 | ||
020 | |a 3410130381 | ||
035 | |a (Sirsi) a125528 | ||
084 | 0 | |a FHAB - Surface and thin film characterization |2 ZB | |
084 | 1 | |a FHA - Materialcharakterisierung |2 LS | |
245 | 0 | 0 | |a Charakterisierung dünner Schichten / |c Hermann Jehn ; Georg Reiners ; Norbert Siegel. |
260 | |a Berlin : |b Beuth, |c 1993. | ||
300 | |a 245 S. | ||
490 | 0 | |a DIN-Fachbericht ; |v 39. | |
500 | |a deutsch | ||
520 | |a Characterization of thin films : | ||
520 | |a (standards and recommendations on measurement techniques for thin film characterization) | ||
520 | |a film thickness | ||
520 | |a chemical composition | ||
520 | |a roughness, porosity, morphology, topography | ||
520 | |a film structure and texture | ||
520 | |a internal stress | ||
520 | |a hardness | ||
520 | |a adhesion | ||
520 | |a color and decorative properties | ||
520 | |a optical thin films | ||
520 | |a additional film parameters | ||
596 | |a 1 | ||
650 | 4 | |a thin film | |
650 | 4 | |a materials characterization | |
700 | 1 | |a Jehn, Hermann. | |
700 | 1 | |a Reiners, Georg. | |
700 | 1 | |a Siegel, Norbert. | |
900 | |a FHA 039 | ||
900 | |a B 059871'01'-039 | ||
908 | |a Verordnung, Norm | ||
949 | |a FHA 039 |w LC |c 1 |i 1200100433 |d 17/10/2011 |e 6/10/2011 |l STACKS |m ZB |n 8 |p €93.10 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |2 VN |