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PACVD of TiN / Blagica Bliznakovska, Horst-Reiner Kötter and Christoph Meixner in cooperation with Stefan Krawczynski and Milosav Milosevski

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Table of Contents
Personal Name(s): Bliznakovska, Blagica, author
Kötter, Horst-Reiner, author / Meixner, Christoph, author / Krawczynski, Stefan, author / Milosevski, Milosav, author
Imprint: Jülich : Forschungszentrum, Zentralbibliothek, 1995
Physical Description: II, 51 Seiten
Note: englisch
ISBN: 3893361472
9783893361472
Series Title: German cooperation in scientific research and technological development with the Faculty of Technology and Metallurgy University Kiril i Metodij, Skopje
Scientific series of the International Bureau ; 29
Subject (ZB):
chemical vapor deposition
Classification:
FGKF - Chemical vapor deposition
Shelf Classification:
FZJ - Schriftenreihen des Forschungszentrums Jülich
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