Laser-assisted microtechnology / Simeon M. Metev ; Vadim P. Veiko.
micromachining of thin films
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| Personal Name(s): | Metev, Simeon M. |
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| Veiko, Vadim P. | |
| Imprint: |
Berlin :
Springer,
1994.
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| Physical Description: |
X, 240 S. |
| Note: |
englisch |
| ISBN: |
9783540539254 0387539255 3540539255 9780387539256 |
| Series Title: |
Springer series in materials science ;
19. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
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Reading Room  Call Number: FGT 004 Barcode: 1095102252
Available
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