Holdings: Silicon processing for the VLSI era.

Silicon processing for the VLSI era. 3. The submicron MOSFET.

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Personal Name(s):	Wolf, Stanley.
Imprint:	Sunset-Beach, CA : Lattice Press, 1995.
Physical Description:	XXII, 722 S.
Note:	englisch
ISBN:	0961672153 9780961672157
Series Title:	Silicon processing for the VLSI era ; 3.
Subject (ZB):	silicon processing VLSI (very large scale integration) microelectronics MOS transistor MOS device isolation
Classification:	FGM - Microelectronic technology
Shelf Classification:	FGM - Mikroelektronik - Technologie

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Reading Room Call Number: FGM 053-03 Barcode: 1096100839 Available