Silicon processing for the VLSI era. 3. The submicron MOSFET.
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Personal Name(s): | Wolf, Stanley. |
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Imprint: |
Sunset-Beach, CA :
Lattice Press,
1995.
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Physical Description: |
XXII, 722 S. |
Note: |
englisch |
ISBN: |
0961672153 9780961672157 |
Series Title: |
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Silicon processing for the VLSI era ;
3. |
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Reading Room Call number: FGM 053-03 Barcode: 1096100839 Available |