Modeling of film deposition for microelectronic applications.
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| Personal Name(s): | Rossnagel, S., editor |
|---|---|
| Imprint: |
San-Diego, CA :
Academic Pr.,
1996.
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| Physical Description: |
XIV, 290 S. |
| Note: |
englisch |
| ISBN: |
9780125330220 0125330227 |
| Series Title: |
Thin films ;
22. |
| Keywords: |
computer modeling |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
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Reading Room  Call Number: FFP 001-22 Barcode: 1097100599
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