Handbook of semiconductor silicon technology / edited by William C. O'Mara ; Robert B. Herring ; Lee P. Hunt
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Personal Name(s): | O'Mara, William C., editor |
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Herring, Robert B., editor / Hunt, Lee P., editor | |
Imprint: |
Park Ridge, N.J. :
Noyes Publications,
1990
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Physical Description: |
XX, 795 Seiten |
Note: |
englisch |
ISBN: |
0815512376 9780815512370 |
Keywords: |
silicon precursors: their manufacture and properties polysilicon preparation crystal growth of silicon silicon wafer preparation silicon epitaxy silicon material properties oxygen, carbon and nitrogen in silicon carrier lifetimes in silicon preparation and properties of polycrystalline silicon films silicon phase diagrams |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: B 073857'01' Barcode: 1094103633 Available |