Integrated chemical microsensor systems in CMOS technology [E-Book] / Andreas Hierlemann.
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Personal Name(s): | Hierlemann, Andreas. |
Imprint: |
Berlin :
Springer,
2005
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ISBN: |
9783540237822 |
Series Title: |
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Microtechnology and MEMS.
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Keywords: |
Optical materials Nanotechnology Surfaces (Physics) Electronics Analytical biochemistry Weights and measures Chemistry Optical and Electronic Materials Nanotechnology Surfaces and Interfaces, Thin Films Electronics and Microelectronics, Instrumentation Analytical Chemistry Measurement Science, Instrumentation |
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