Electroceramic-based MEMS [E-Book] : fabrication-technology and applications / ed. by Nava Setter.
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Full text |
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Personal Name(s): | Setter, Nava, editor |
Imprint: |
Boston, MA :
Springer,
2005
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ISBN: |
9780387233109 |
Series Title: |
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Electronic materials ;
9. |
Keywords: |
Optical materials Nanotechnology Materials Electronics Chemistry Optical and Electronic Materials Nanotechnology Characterization and Evaluation Materials Ceramics, Glass, Composites, Natural Methods Electronics and Microelectronics, Instrumentation |
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