Organometallic vapor phase epitaxy : theory and practice / Gerald B. Stringfellow.
Organometallic vapor phase epitaxy (omvpe) :
Saved in:
Personal Name(s): | Stringfellow, Gerald B. |
---|---|
Imprint: |
Boston :
Academic Press,
1989.
|
Physical Description: |
XVIII, 398 S. |
Note: |
englisch |
ISBN: |
9780126738407 0126738408 |
Subject (ZB): | |
Classification: |
LEADER | 01269cam a2200361 n 4500 | ||
---|---|---|---|
001 | 17594 | ||
005 | 19991116105000.0 | ||
008 | r1989 | ||
020 | |a 0126738408 | ||
035 | |a (Sirsi) a25101 | ||
084 | 0 | |a FGKF - Chemical vapor deposition |2 ZB | |
245 | 0 | 0 | |a Organometallic vapor phase epitaxy : |b theory and practice / |c Gerald B. Stringfellow. |
260 | |a Boston : |b Academic Press, |c 1989. | ||
300 | |a XVIII, 398 S. | ||
500 | |a englisch | ||
520 | |a Organometallic vapor phase epitaxy (omvpe) : | ||
520 | |a overview | ||
520 | |a source molecules (precursors) | ||
520 | |a thermodynamics | ||
520 | |a kinetics | ||
520 | |a hydrodynamics and mass transport | ||
520 | |a design of the omvpe process | ||
520 | |a application to specific materials (iii-v semiconductors, ii-v semiconductors) | ||
520 | |a application to superlattice structures | ||
520 | |a application to device manufacturing | ||
596 | |a 1 | ||
650 | 4 | |a compound semiconductor | |
650 | 4 | |a epitaxy | |
650 | 4 | |a crystal growth | |
700 | 1 | |a Stringfellow, Gerald B. | |
900 | |a B 066429'01' | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a B 066429'01' |w LC |c 1 |i 1090101879 |d 25/4/2013 |e 27/3/2013 |l STACKS |m ZB |n 3 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |