Chemical Solution Deposition of Functional Oxide Thin Films [E-Book] / edited by Theodor Schneller, Rainer Waser, Marija Kosec, David Payne.
This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type...
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Full text |
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Personal Name(s): | Schneller, Theodor. editor |
Kosec, Marija. editor / Payne, David. editor / Waser, Rainer. editor | |
Imprint: |
Vienna :
Springer,
2013
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Physical Description: |
XVII, 796 p. 390 illus., 133 illus. in color. online resource. |
Note: |
englisch |
ISBN: |
9783211993118 |
DOI: |
10.1007/978-3-211-99311-8 |
Subject (ZB): | |
Subject (LOC): | |
Classification: |
This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered |