Rapid thermal and integrated processing 0003: symposium : San-Francisco, CA, 04.04.94-07.04.94.
Rapid thermal and integrated processing :
Saved in:
Personal Name(s): | Wortman, J. J., editor |
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Imprint: |
Pittsburgh, PA :
Materials Research Society,
1994.
|
Physical Description: |
XI, 450 S. |
Note: |
englisch |
ISBN: |
1558992421 9781558992429 |
Series Title: |
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Materials Research Society symposium proceedings ;
342. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
LEADER | 01392cam a2200373 n 4500 | ||
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001 | 50505 | ||
005 | 19980415000000.0 | ||
008 | r1994 | ||
020 | |a 1558992421 | ||
035 | |a (Sirsi) a48923 | ||
084 | 0 | |a FGJ - Laser and electron beam processing |2 ZB | |
084 | 1 | |a FAF - Materialforschung - allgemeine Serien |2 LS | |
245 | 0 | 0 | |a Rapid thermal and integrated processing 0003: symposium : |b San-Francisco, CA, 04.04.94-07.04.94. |
260 | |a Pittsburgh, PA : |b Materials Research Society, |c 1994. | ||
300 | |a XI, 450 S. | ||
490 | 0 | |a Materials Research Society symposium proceedings ; |v 342. | |
500 | |a englisch | ||
520 | |a Rapid thermal and integrated processing : | ||
520 | |a temperature measurement | ||
520 | |a rapid thermal cvd of sige | ||
520 | |a novel applications of rtp | ||
520 | |a rapid thermal processing for metallization | ||
520 | |a dielectrics | ||
520 | |a rapid thermal cvd and integrated processing | ||
520 | |a rapid thermal annealing (rta) | ||
520 | |a Rtp modeling and equipment issues | ||
596 | |a 1 | ||
650 | 4 | |a rapid thermal processing | |
700 | 1 | |a Wortman, J. J., |e Hrsg. | |
710 | 2 | |a Materials Research Society. | |
900 | |a FAF 007-342 | ||
900 | |a S 004937-0342'01' | ||
908 | |a Konferenz | ||
949 | |a FAF 007-342 |w LC |c 1 |i 1094102819 |d 16/3/1998 |l STACKS |m ZB |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |2 KONFERENZ |