Stress induced phenomena in metallization: international workshop 0001 : Ithaca, NY, 11.09.91-13.09.91.
Stress induced phenomena in metallization
Saved in:
Personal Name(s): | Li, C. Y., editor |
---|---|
Imprint: |
New-York, NY :
American Institute of Physics,
1992.
|
Physical Description: |
VII, 280 S. |
Note: |
englisch |
ISBN: |
1563960826 9781563960826 |
Series Title: |
/* Depending on the record driver, $field may either be an array with
"name" and "number" keys or a flat string containing only the series
name. We should account for both cases to maximize compatibility. */?>
AIP conference proceedings ;
vol 0263. /* Depending on the record driver, $field may either be an array with "name" and "number" keys or a flat string containing only the series name. We should account for both cases to maximize compatibility. */?> American Vacuum Society series ; vol 0013. |
Subject (ZB): | |
Classification: |
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---|---|---|---|
001 | 50818 | ||
005 | 20051012110100.0 | ||
008 | r1992 | ||
020 | |a 1563960826 | ||
035 | |a (Sirsi) a49220 | ||
084 | 0 | |a FGMH - Metallization, physics of microelectronics |2 ZB | |
245 | 0 | 0 | |a Stress induced phenomena in metallization: international workshop 0001 : |b Ithaca, NY, 11.09.91-13.09.91. |
260 | |a New-York, NY : |b American Institute of Physics, |c 1992. | ||
300 | |a VII, 280 S. | ||
490 | 0 | |a AIP conference proceedings ; |v vol 0263. | |
490 | 0 | |a American Vacuum Society series ; |v vol 0013. | |
500 | |a englisch | ||
520 | |a Stress induced phenomena in metallization | ||
520 | |a (stress induced voiding, implications on reliability, directions for future research) | ||
596 | |a 1 | ||
650 | 4 | |a metallization | |
700 | 1 | |a Li, C. Y., |e Hrsg. | |
900 | |a S 001905-0263'01' | ||
908 | |a Konferenz | ||
949 | |a S 001905-0263'01' |w LC |c 1 |i 1094100134 |d 18/9/1997 |e 28/8/1997 |l STACKS |m ZB |n 1 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |2 KONFERENZ |