Hydrogen in Crystalline Semiconductors [E-Book] / by Stephen J. Pearton, James W. Corbett, Michael Stavola.
Saved in:
Full text |
|
Personal Name(s): | Pearton, Stephen J., author |
Corbett, James W., author / Stavola, Michael, author | |
Imprint: |
Berlin, Heidelberg :
Springer,
1992
|
Physical Description: |
XI, 363 p. online resource. |
Note: |
englisch |
ISBN: |
9783642847783 |
DOI: |
10.1007/978-3-642-84778-3 |
Series Title: |
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Springer Series in Materials Science ;
16 |
Subject (LOC): |
- 1. Introduction
- 2. Hydrogen Incorporation in Crystalline Semiconductors
- 2.1 Techniques for Hydrogen Incorporation in Semiconductors
- 2.2 Survey of the Configurations of Hydrogen in Semiconductors
- 3. Passivation of Deep Levels by Hydrogen
- 3.1 Deep-Level Passivation in Silicon
- 3.2 Passivation of Defects in Gallium Arsenide
- 3.3 Aluminum Gallium Arsenide
- 3.4 Gallium Phosphide
- 3.5 CdHgTe, Zn3P2
- 3.6 Germanium
- 4. Shallow Impurity Passivation by Atomic Hydrogen
- 4.1 Silicon
- 4.2 Gallium Arsenide
- 4.3 AlGaAs
- 4.4 CdTe and ZnTe
- 4.5 Gallium Phosphide
- 4.6 Germanium
- 4.7 Indium Phosphide
- 4.8 BN and BP
- 4.9 Correlation with Muonium
- 5. Microscopic Properties of Hydrogen-Related Complexes in Silicon from Vibrational Spectroscopy
- 5.1 Vibrational Spectroscopy of H-Related Complexes
- 5.2 Uniaxial Stress Studies of H-Related Complexes
- 5.3 Hydrogen Motion in the B-H Complex
- 5.4 Conclusion
- 6. The Microscopic Characteristics of Impurity-Hydrogen Complexes in III-V Semiconductors
- 6.1 Acceptor-H Complexes
- 6.2 Donor-H Complexes
- 6.3 Unintentional Hydrogenation
- 6.4 Uniaxial Stress Studies
- 6.5 Cluster Calculations for H-Related Complexes in GaAs
- 6.6 Conclusion
- 7. Hydrogen, and Semiconductor Surfaces and Surface Layers
- 7.1 Etching of Silicon Surfaces by Hydrogen
- 7.2 Plasma Etching
- 7.3 Implantation of Protons
- 7.4 Hydrogen on Semiconductor Surfaces
- 8. Hydrogen-Related Defects in Semiconductors
- 8.1 Hydrogen-Related Defects in Silicon
- 8.2 Hydrogen-Related Defects in Germanium
- 8.3 Hydrogen-Related Defects in Compound Semiconductors
- 8.4 Hydrogen-Related IR Bands in Silicon
- 9. Diffusion of Hydrogen in Semiconductors
- 9.1 Diffusion of Hydrogen in Solids
- 9.2 Diffusion Equations
- 9.3 Analysis of Diffusion Profiles
- 9.4 Diffusion of Hydrogen in Silicon
- 9.5 Diffusion of Hydrogen in Germanium
- 9.6 Diffusion in Gallium Arsenide
- 9.7 Diffusion of Hydrogen in Other Materials
- 9.8 Summary
- 10. Resonance Studies Pertinent to Hydrogen in Semiconductors
- 10.1 Electron Paramagnetic Resonance
- 10.2 Related Muon Studies
- 10.3 Perturbed Angular Correlation
- 11. Prevalence of Hydrogen Incorporation and Device Applications
- 11.1 Experimental Studies of Hydrogen Incorporation
- 11.2 Hydrogen Sensing with MOS Structures
- 11.3 Hydrogen in III-V Semiconductors
- 12. Hydrogen and the Mechanical Properties of Semiconductors
- 12.1 Hydrogen Embrittlement
- 12.2 Hydrogen-Related Defects
- 12.3 m-V Semiconductors
- References.