Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) (formerly: Journal of Microlithography, Microfabrication, and Microsystems) (JM3) [E-Journal]
Saved in:
Go to E-Journal |
|
ISSN: |
1932-5150 (Druckausgabe) 1932-5134 (E-Journal) 2708-8340 (E-Journal) |
EZB-ID: |
29051 |
ZDB-ID: |
3056313-6 |
Imprint: |
SPIE
|
Keywords: |
Elektrotechnik, Elektronik, Nachrichtentechnik |
Loading |
LEADER | 01716cam a2200409 a 4500 | ||
---|---|---|---|
001 | (Sirsi) aEZB_29051 | ||
035 | |a (Sirsi) aEZB_29051 | ||
022 | |a 1932-5150 |q (Druckausgabe) | ||
022 | |9 19325150 |q (Druckausgabe) | ||
022 | |a 1932-5134 |q (E-Journal) | ||
022 | |9 19325134 |q (E-Journal) | ||
022 | |a 2708-8340 |q (E-Journal) | ||
022 | |9 27088340 |q (E-Journal) | ||
024 | |a 3056313-6 |2 ZDBID | ||
024 | |a 29051 |2 EZBID | ||
245 | 0 | 0 | |a Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) (formerly: Journal of Microlithography, Microfabrication, and Microsystems) (JM3) [E-Journal] |
222 | |a Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) (formerly: Journal of Microlithography, Microfabrication, and Microsystems) (JM3) [E-Journal] |a J Micro Nanolithogr MEMS MOEMS (JuSER) | ||
260 | |b SPIE | ||
960 | |b SPIE | ||
653 | |a Elektrotechnik, Elektronik, Nachrichtentechnik | ||
856 | |u https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/issues |z Zeitschrift aufrufen | ||
950 | |a natli_spiedl |b Paket:Kollektion | ||
915 | |0 StatID:(DE-HGF)1230 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0030 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0150 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0160 |2 StatID | ||
915 | |0 StatID:(DE-HGF)1150 |2 StatID | ||
915 | |0 StatID:(DE-HGF)1160 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0600 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0300 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0113 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0200 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0430 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0199 |2 StatID | ||
915 | |0 StatID:(DE-HGF)0100 |2 StatID | ||
915 | |0 StatID:(DE-HGF)9900 |2 StatID | ||
949 | |t ZBZEZB |t ZBAZ |y 2 |