Materials Science in Semiconductor Processing [E-Journal]
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| ISSN: |
1369-8001 (Druckausgabe) 1873-4081 (E-Journal) |
| EZB-ID: |
6775 |
| ZDB-ID: |
2029689-7 |
| Imprint: |
Elsevier
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| Keywords: |
Elektrotechnik, Elektronik, Nachrichtentechnik;Maschinenbau Chemistry - Chemical Engineering Engineering - Electrical Engineering |
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| 245 | 0 | 0 | |a Materials Science in Semiconductor Processing [E-Journal] |
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| 653 | |a Elektrotechnik, Elektronik, Nachrichtentechnik;Maschinenbau |a Chemistry - Chemical Engineering |a Engineering - Electrical Engineering | ||
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