Journal of Vacuum Science and Technology (JVST) B: Nanotechnology and Microelectronics [E-Journal]
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| ISSN: |
0734-211X (Druckausgabe) 1071-1023 (Druckausgabe) 2166-2746 (Druckausgabe) 2166-2754 (E-Journal) |
| EZB-ID: |
743 |
| ZDB-ID: |
3117331-7 |
| Imprint: |
American Vacuum Society (AVS)
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| Keywords: |
Elektrotechnik, Elektronik, Nachrichtentechnik;Physik Engineering - Electronics Engineering - Instrumentation Engineering - Mechanical Engineering Engineering - Metrology Material Science and Metallurgy - Nanomaterials Physics - General and Others Physics - Plasma Physics |
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| 245 | 0 | 0 | |a Journal of Vacuum Science and Technology (JVST) B: Nanotechnology and Microelectronics [E-Journal] |
| 222 | |a Journal of Vacuum Science and Technology (JVST) B: Nanotechnology and Microelectronics [E-Journal] |a JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY PART B MICROELECTRONICS PROCESSING (SFX) |a JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS PROCESSING AND PHENOMENA (SFX) |a JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, MICROELECTRONICS PROCESSING AND PHENOMENA (SFX) |a JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (SFX) |a J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom (JuSER) |a J Vac Sci Technol B Nanotechnol Microelectron (JuSER) | ||
| 260 | |b American Vacuum Society (AVS) | ||
| 960 | |b American Vacuum Society (AVS) | ||
| 653 | |a Elektrotechnik, Elektronik, Nachrichtentechnik;Physik |a Engineering - Electronics |a Engineering - Instrumentation |a Engineering - Mechanical Engineering |a Engineering - Metrology |a Material Science and Metallurgy - Nanomaterials |a Physics - General and Others |a Physics - Plasma Physics | ||
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