This title appears in the Scientific Report :
2003
Please use the identifier:
http://dx.doi.org/10.1016/S0925-4005(03)00061-3 in citations.
A long-term stable macroporous-type EIS structure for electrochemical sensor applications
A long-term stable macroporous-type EIS structure for electrochemical sensor applications
A novel macroporous-type EIS (electrolyte-insulator-semiconductor) sensor for the detection of (bio-)chemical substances in aqueous solutions is presented. For the preparation of the macroporous layer, a specific cell configuration has been designed, which allows the formation of macroporous Si duri...
Saved in:
Personal Name(s): | Simonis, A. |
---|---|
Ruge, C. / Müller-Veggian, M. / Lüth, H. / Schöning, M. J. | |
Contributing Institute: |
Institut für Bio- und Chemosensoren; ISG-2 Institut für Halbleiterschichten und Bauelemente; ISG-1 |
Published in: |
Sensors and actuators |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2003
|
Physical Description: |
21 - 25 |
DOI: |
10.1016/S0925-4005(03)00061-3 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Sensors and Actuators B
91 |
Subject (ZB): | |
Publikationsportal JuSER |
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520 | |a A novel macroporous-type EIS (electrolyte-insulator-semiconductor) sensor for the detection of (bio-)chemical substances in aqueous solutions is presented. For the preparation of the macroporous layer, a specific cell configuration has been designed, which allows the formation of macroporous Si during the anodic etching process by means of a liquid contact. After the etching process, the SiO2/Si3N4 double layer insulator can be advantageously deposited by high-temperature processes, like thermal oxidation and low-pressure chemical vapour deposition (LPCVD) to realise the porous pH sensor. The so prepared pH sensors have an averaged sensitivity of about 59 mV/pH (concentration range between pH 4 and 9) during a period of more than 1 year. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised by simple physical adsorption into the porous structure. The sensitivity of the biosensor was about 140 mV/mM in the concentration range between 0.01 and 0.5 mM penicillin G. (C) 2003 Elsevier Science B.V. All rights reserved. | ||
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