“...NanoScience and Technology...”

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Table of Contents: “...1 Direct Bonding, Fusion Bonding, Anodic Bonding, Wafer Bonding: A Historical Patent Picture of the Worldwide Moving Front of the State-of-the-Art of Contact Bonding -- 2 Basics of Silicon-on-Insulator (SOI) Technology -- 3 Silicon-on-Insulator...”

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