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1
Book
Symposium on electron and ion beam science and technology. 8 : proceedings Seattle, WA, 22.05.78.
Bakish, R.
1978
Subject (ZB):
“
...
ion
implantation
...
”
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Name
Bakish, R.
Subject
X-ray lithography
1
ion implantation
1
Classification
FGGE - Ion beam surface modification
1
FGJ - Laser and electron beam processing
1
FGME - Microlithography
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