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Keudell, Achim von.
FGKJ - Plasma processing, etching
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Keudell, Achim von.
FGKJ - Plasma processing, etching
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1
Book
Wachstumsmechanismen bei der plasmagestuetzten Abscheidung von Kohlenwasserstoffschichten, eine in situ Ellipsometriestudie.
Keudell, Achim von.
1996
Subject (ZB):
“
...thin
film
technology...
”
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Keudell, Achim von.
Subject
ellipsometry
1
thin film technology
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FGK - Thin film technology, epitaxy
1
FGKJ - Plasma processing, etching
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