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Reichl, H.
ZB
Print Edition
microfabrication (for microelectronics only)
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Reichl, H.
ZB
Print Edition
microfabrication (for microelectronics only)
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Micro system technologies 1994 : International conference on micro electro, opto, mechanical systems and components 0004 : Micro system technologies: international conference 0004...
Reichl, H.
1994
“
...
FGT
-
Microtechnology
...
”
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ZB
Name
Reichl, H.
Subject
actuator
1
microfabrication (for microelectronics only)
microtechnology
1
sensor (technical and physical)
1
thin film technology
1
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FGT - Microtechnology
1
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