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Tu, K. N.
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Tu, K. N.
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1
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Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, USA : [Symposium on Advanced Metallization for Future ULSI] /
Tu, K. N.
1997
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2
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Preparation and properties of thin films.
Tu, K. N.
1982
“
...FGK - Thin film
technology
, epitaxy...
”
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IFF
ZB
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Tu, K. N.
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ULSI (ultra large scale integration)
1
construction
1
design
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integrated circuit
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metallization
1
thin film
1
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FFP - Physics of thin films
1
FGK - Thin film technology, epitaxy
1
FGMH - Metallization, physics of microelectronics
1
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