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CLD - High temperature chemistry, plasma chemistry
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PGA - Plasma physics
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CLD - High temperature chemistry, plasma chemistry
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
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Dusty plasmas : physics, chemistry and technological impacts in plasma processing /
Bouchoule, Andre
1999
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IEK-4
1
ZB
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Name
Bouchoule, Andre
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Kawai, Yoshinobu
1
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plasma
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biological aspect
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cold plasma
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engineering
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environmental impact
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flow distribution
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gas flow
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ionized gas
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plasma chemistry
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thin film technology
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Classification
CLD - High temperature chemistry, plasma chemistry
PGA - Plasma physics
FGKJ - Plasma processing, etching
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