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FFPG - Multilayer systems, quantum structures
chemical vapor deposition
AND
semiconductor heterostructure
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FFPG - Multilayer systems, quantum structures
chemical vapor deposition
AND
semiconductor heterostructure
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E-Book
Untersuchung der Inselbildung im System SiGe/Si [E-Book] /
Goryll, Michael
1998
Subject (ZB):
“
...scanning
electron
microscopy...
”
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ZB
1
Name
Goryll, Michael
1
Subject
chemical vapor deposition
force microscopy
1
scanning electron microscopy
1
semiconductor heterostructure
Classification
FFPG - Multilayer systems, quantum structures
FGKF - Chemical vapor deposition
1
FHAB - Surface and thin film characterization
1
Language
German
1
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