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FGKF - Chemical vapor deposition
AND
FGKJ - Plasma processing, etching
ZB
Print Edition
evaporation
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FGKF - Chemical vapor deposition
AND
FGKJ - Plasma processing, etching
ZB
Print Edition
evaporation
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Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
Kienel, G.
1995
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ZB
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Kienel, G.
1
Subject
etching
1
evaporation
ion beam technology
1
ion plating
1
sputtering
1
vacuum deposition
1
Classification
FGKC - Vacuum deposition, MBE
1
FGKF - Chemical vapor deposition
FGKJ - Plasma processing, etching
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