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FGKF - Chemical vapor deposition
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FHAB - Surface and thin film characterization
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FGKF - Chemical vapor deposition
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FHAB - Surface and thin film characterization
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E-Book
Untersuchung der Inselbildung im System SiGe/Si [E-Book] /
Goryll, Michael
1998
“
...FHAB - Surface and thin
film
characterization...
”
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Electronic Edition
1
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Book
1
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ZB
1
Name
Goryll, Michael
1
Subject
chemical vapor deposition
1
force microscopy
1
scanning electron microscopy
1
semiconductor heterostructure
1
Classification
FFPG - Multilayer systems, quantum structures
1
FGKF - Chemical vapor deposition
FHAB - Surface and thin film characterization
Language
German
1
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