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FGKJ - Plasma processing, etching

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FGKJ - Plasma processing, etching

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Books & more: Hits 1 - 20 of 79

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Plasma nanoscience : basic concepts and applications of deterministic nanofabrication /

Ostrikov, Kostya (Ken)
2008

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Plasma- und ionenstrahlunterstützte Verfahren für die Oberflächen- und Dünnschichttechnologie : Studie zur Analyse und Bewertung des derzeitigen technischen Standes und Strukturier...

Rie, Kyong Tschong

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Columnar structured Thermal Barrier Coatings deposited by axial Suspension Plasma Spraying /

Zhou, Dapeng
2019

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Handbook of plasma immersion ion implantation and deposition /

Anders, Andre
2000

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Plasmainduzierte Abscheidung von amorphem Silicium aus Silan : vom Verständnis der chemischen Reaktionsmechanismen zur Abscheidung von hochwertigem amorphen Silicium mit grossen De...

Ambacher, Oliver
1993

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Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /

Allen, Susan D.
1984

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Field assisted sintering of yttria ceramics for plasma etching applications /

Kindelmann, Moritz
2021

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Principles of plasma discharges and materials processing /

Lichtenberg, Allan J.
2005

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Low temperature plasma physics : fundamental aspects and applications /

Hippler, Rainer
2001

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Plasma metallurgy : The principles.

Dembovsky, V.
1985

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Großflächige Plasmaabscheidung von mikrokristallinem Silizium für mikromorphe Dünnschichtsolarmodule /

Kilper, Thilo
2009

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Industrial plasma technology : applications from environmental to energy technologies /

Kawai, Yoshinobu
2010

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Ipat 1981 : Ion and plasma assisted techniques: international conference 3 : Amsterdam, 30.06.81-02.07.81.

1981

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Preparation and characterization : Film preparation and etching by plasma technology : international seminar : Brighton, 25.03.81-27.03.81.

1981

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La gravure seche et le depot plasma en microelectronique: symposium international. 0003 : Cachan, 26.11.1985-29.11.1985.

1985

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Plasma etching : an introduction /

Manos, Dennis M.
1989

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Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-2...

Hochman, Robert F.
1988

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Plasma deposition, treatment, and etching of polymers /

D' Agostino, Riccardo.
1990

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Ätzpraxis für Halbleiter /

Bogenschütz, August Friedrich.
1967

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Glow discharge processes : sputtering and plasma etching /

Chapman, Brian N.
1980

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Print Edition

Book 79

Conference Publication 32 Handbook, Textbook 6 Theses 5

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To:

ZB IEK-4 3 IBN-1-2 2 IFF 2 IBN-3-4 1 IEK-5 1 more ... INM-5 1 see all ... less ...

Apelian, Diran 2 Broszeit, E. 2 Heimann, R. B. 2 Pulker, H. K. 2 Szekely, Julian 2 Allen, Susan D. 1 more ... Ambacher, Oliver 1 Anders, Andre 1 Annett, D. M. 1 Arata, Yoshiaki 1 Beckert, M. 1 Benko, B. 1 Bergmann, E. 1 Bernhardt, A. F. 1 Bock, F. 1 Bogenschütz, August Friedrich. 1 Brauer, K. H. 1 Chang, R. P. 1 Chapman, Brian N. 1 Cheremisinoff, Paul N. 1 Coburn, J. W. 1 Collie, M. J. 1 D' Agostino, Riccardo. 1 Datta, Madhav 1 Dembovsky, V. 1 Eichhorn, F. 1 Einspruch, N. G. 1 Farah, Oscar G. 1 Faul, Wolfgang. 1 Fenton, James M. 1 see all ... less ...

plasma processing 19 etching 18 plasma etching 14 plasma deposition 10 thin film technology 5 chemical vapor deposition 4 more ... electron beam processing 3 ion beam processing 3 ion implantation 3 laser processing 3 materials processing 3 plasma physics 3 sputter deposition 3 surface modification 3 cold plasma 2 evaporation 2 plasma 2 plasma arc spraying 2 plasma diagnostics 2 plasma wall interaction 2 spray coating 2 sputtering 2 vacuum deposition 2 III - V semiconductor 1 amorphous silicon 1 beam processing 1 biological aspect 1 ceramics 1 cleaning 1 coating 1 see all ... less ...

FGKJ - Plasma processing, etching FAF - Materials research - comprehensive works 8 FGGE - Ion beam surface modification 5 FGJ - Laser and electron beam processing 5 FGKC - Vacuum deposition, MBE 5 FGM - Microelectronic technology 5 more ... FPUG - Special purpose coatings 4 FGK - Thin film technology, epitaxy 3 FPQ - Surface friction, hardness, wear, lubrication 3 PGA - Plasma physics 3 CLD - High temperature chemistry, plasma chemistry 2 FGGB - Ion implantation, ion beam synthesis 2 FGKF - Chemical vapor deposition 2 FMGE - Metallographic specimen preparation 2 FPU - Corrosion protection, surface coating 2 FPUJ - Surface engineering 2 PGCC - Electric discharges in gases 2 CER - Macromolecular compounds - synthesis and reactions 1 EISF - Thin film solar cells 1 FAQ - Materials research - institutions, research and development 1 FDCD - Dislocations 1 FFP - Physics of thin films 1 FGA - Materials processing - general aspects 1 FGCD - Crystal growth of specific substances 1 FGCK - Crystal technology 1 FGG - Ion beam technology 1 FGT - Microtechnology 1 FJEC - Amorphous semiconductors 1 FJKB - Elemental semiconductors 1 FJKC - III - V semiconductors 1 see all ... less ...

English 9 German 6

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