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FGKJ - Plasma processing, etching
film deposition
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FGKJ - Plasma processing, etching
film deposition
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1
E-Book
Plasmagestützte Abscheidung und Charakterisierung von dünnen mehrphasigen Schichten [E-Book] /
Nöthe, Michael
2000
Subject (ZB):
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...
film
deposition...
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2
Book
Handbook of plasma immersion ion implantation and deposition /
Anders, Andre
2000
Subject (ZB):
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...
film
deposition...
”
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1
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1
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Book
2
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Handbook, Textbook
1
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ZB
2
Name
Anders, Andre
1
Nöthe, Michael
1
Subject
film deposition
plasma processing
2
coating
1
industrial aspect
1
ion implantation
1
materials characterization
1
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metal surface
1
surface properties
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Classification
FGKJ - Plasma processing, etching
FGGB - Ion implantation, ion beam synthesis
1
FHAB - Surface and thin film characterization
1
FPU - Corrosion protection, surface coating
1
Language
English
1
German
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