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FGKJ - Plasma processing, etching
surface analysis
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FGKJ - Plasma processing, etching
surface analysis
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1
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Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
Subject (ZB):
“
...thin
film
technology...
”
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ZB
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Frey, H.
1
Subject
ion implantation
1
plasma diagnostics
1
plasma physics
1
surface analysis
thin film technology
1
vacuum deposition
1
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FGKC - Vacuum deposition, MBE
1
FGKJ - Plasma processing, etching
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