Einspruch, N. G. 14 Board, K. 4 Sze, S. M. 4 Wolf, Stanley. 4 Colinge, Jean-Pierre 3 Morgan, D. V. 3 more ... Campbell, S. A. 2 Einspruch, Norman G. 2 Gail, Lothar 2 Hoppe, Bernhard. 2 Levy, R. A. 2 Machlin, Eugene S. 2 Mader, H. 2 Murarka, Shyam P. 2 Nalwa, Hari Singh 2 Nishizawa, J. 2 Sugano, T. 2 Tauber, Richard N. 2 Varadan, Vijay. K. 2 Adler, David A. 1 Akins, Vaughn 1 Anthony, Joseph B. 1 Augke, Ralf 1 Ballantyne, J. M. 1 Barbe, D. F. 1 Barker, J. R. 1 Bate, R. T. 1 Bauer, Walter. 1 Beadle, W. E. 1 Bean, K. E. 1 see all ... less ...

microelectronics 45 VLSI technology 28 microfabrication (for microelectronics only) 26 semiconductor device 26 integrated circuit 21 semiconductor processing 19 more ... VLSI (very large scale integration) 15 silicon 14 thin film technology 12 electronic device 9 microtechnology 9 solid state device 8 chemical vapor deposition 6 lithography 6 semiconductor 6 MOS transistor 5 cleaning 5 gallium arsenide 5 nanotechnology 5 sensor (technical and physical) 5 MOS device 4 semiconductor surface 4 silicon device 4 transistor 4 clean room 3 dielectric constant 3 epitaxy 3 etching 3 microlithography 3 quantum electronics 3 see all ... less ...

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