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FGM - Microelectronic technology
chemical vapor deposition
AND
epitaxy
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FGM - Microelectronic technology
chemical vapor deposition
AND
epitaxy
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1
Book
Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
Hoppe, Bernhard.
1998
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2
Book
Advances in rapid thermal and integrated processing : NATO advanced study institute on advances in rapid thermal and integrated processing: proceedings : Acquafredda-di-Maratea, 03...
Roozeboom, F.
1996
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3
E-Book
Untersuchung der Facettenbildung bei selektiver Epitaxie von Si mittels LPCVD [E-Book] /
Grimm, Karsten
1997
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4
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ULSI technology /
Chang, C. Y.
1996
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Available as
Print Edition
3
Electronic Edition
1
Material Type
Book
4
Type of Literature
Handbook, Textbook
1
Conference Publication
1
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1
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ZB
3
IBN-1-2
1
IFF
1
Name
Chang, C. Y.
1
Grimm, Karsten
1
Hoppe, Bernhard.
1
Roozeboom, F.
1
Subject
chemical vapor deposition
epitaxy
etching
2
semiconductor
2
ULSI (ultra large scale integration)
1
diffusion
1
more ...
emissivity
1
fabrication
1
ion implantation
1
lithography
1
metallization
1
microfabrication (for microelectronics only)
1
microlithography
1
rapid thermal processing
1
reliability
1
semiconductor device
1
thin film technology
1
transmission electron microscopy
1
wafer scale integration
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Classification
FGM - Microelectronic technology
FGK - Thin film technology, epitaxy
2
TBL - VLSI
1
Language
German
1
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