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FGM - Microelectronic technology
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FGM - Microelectronic technology
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1
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Modeling of film deposition for microelectronic applications.
Rossnagel, S.
1996
Subject (ZB):
“
...
sputter
deposition
...
”
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Rossnagel, S.
1
Subject
chemical vapor deposition
1
mathematical method
1
simulation
1
sputter deposition
1
thin film physics
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Classification
FANE - Computational solid state physics
1
FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
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