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TBD - Microelectronics
ZB
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1
Book
Semiconductor microchips and fabrication : a practical guide to theory and manufacturing /
Lian, Yaguang
2023
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FGM
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Mikroelektronik
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Technologie
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2
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Microelectronic applications of chemical mechanical planarization /
Li, Yuzhuo
2008
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Mikroelektronik
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3
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Principles of lithography /
Levinson, Harry J.
2001
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Mikroelektronik
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Technologie
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ZB
Name
Levinson, Harry J.
1
Li, Yuzhuo
1
Lian, Yaguang
1
Subject
microelectronics
3
integrated circuit
2
microfabrication (for microelectronics only)
2
semiconductor device
2
semiconductor processing
2
electronic circuit
1
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lithography
1
metrology
1
microlithography
1
semiconductor
1
semiconductor interface
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semiconductor junction
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semiconductor surface
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Classification
TBD - Microelectronics
FGM - Microelectronic technology
2
FGME - Microlithography
1
FJLB - Physics of semiconductor devices
1
TBF - Semiconductor devices
1
TBJ - Integrated circuits
1
Language
English
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