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Select result number 1
1
Book
Reaktives Sputtern von Oxidfilmen: Herstellung dielektrischer dünner Schichten für technische Anwendungen /
Stollenwerk, J.
1993
Subject (ZB):
“
...
sputter
deposition
...
”
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IBN-1-2
Name
Stollenwerk, J.
1
Subject
oxide coating
1
sputter deposition
1
Classification
FGGE - Ion beam surface modification
1
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