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1

Modeling of chemical vapor deposition of Tungsten films /

Book

Modeling of chemical vapor deposition of Tungsten films /

Kleijn, Chris R.
2013

Table of Contents

2

Principles of plasma discharges and materials processing /

Book

Principles of plasma discharges and materials processing /

Lichtenberg, Allan J.
2005

Subject (ZB): “...thin film technology...”
Table of Contents

3

Synthetic diamond : emerging CVD science and technology /

Book

Synthetic diamond : emerging CVD science and technology /

1994

Subject (ZB): “...diamond film...”

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