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IEK-4
sputtering
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IEK-4
sputtering
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1
Book
Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies /
Behrisch, Rainer.
2007
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2
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Physical processes of the interaction of fusion plasmas with solids.
Hofer, Wolfgang Otto
1996
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3
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Sputtering by particle bombardment vol 0003: characteristics of sputtered particles, technical applications.
Behrisch, R.
1991
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Available as
Print Edition
3
Material Type
Book
3
Year of Publication
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To:
Location
IEK-4
ZB
3
Name
Behrisch, R.
1
Behrisch, Rainer.
1
Hofer, Wolfgang Otto
1
Subject
sputtering
Tokamak device
1
control
1
electron emission
1
erosion
1
film deposition
1
more ...
hot plasma
1
particle
1
plasma wall interaction
1
radiation damage
1
recycling
1
solid
1
thin film
1
thin film technology
1
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Classification
FANE - Computational solid state physics
1
FGK - Thin film technology, epitaxy
1
FGKC - Vacuum deposition, MBE
1
PGLJ - Plasma wall interaction, divertors
1
Language
English
1
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