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IEK-5
FGM - Microelectronic technology
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IEK-5
FGM - Microelectronic technology
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Dry etching for microelectronics.
Powell, R. A.
1984
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etching
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IEK-5
ZB
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Powell, R. A.
1
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etching
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FGKJ - Plasma processing, etching
1
FGM - Microelectronic technology
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