Dry etching for microelectronics.
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| Personal Name(s): | Powell, R. A., editor |
|---|---|
| Imprint: |
Amsterdam :
North Holland,
1984.
|
| Physical Description: |
XI, 299 S. |
| Note: |
englisch |
| ISBN: |
9780444869050 0444869050 |
| Series Title: |
Materials processing ;
4. |
| Keywords: |
dry etching : microelectronics |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
Call Number: FGK 097 Barcode: 1086004694
