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IEK-5
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1
Book
Silicon processing for photovoltaics. 1.
Khattak, C. P.
1985
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2
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Dry etching for microelectronics.
Powell, R. A.
1984
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3
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Laser materials processing.
Bass, Michael
1983
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IEK-5
ZB
3
Name
Bass, Michael
1
Khattak, C. P.
1
Powell, R. A.
1
Subject
etching
1
laser processing
1
Classification
FGCD - Crystal growth of specific substances
1
FGJ - Laser and electron beam processing
1
FGKJ - Plasma processing, etching
1
FGM - Microelectronic technology
1
FJEC - Amorphous semiconductors
1
FJKB - Elemental semiconductors
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