Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
IFF
AND
ZB
VLSI technology
Reset Filters
Show filters (3)
IFF
AND
ZB
VLSI technology
Ask a Librarian
Books & more
: Hits
1 - 3
of
3
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
Silicon processing for the VLSI era. 1. Process
technology
/
Wolf, Stanley.
2000
Subject (ZB):
“
...VLSI
technology
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
Book
VLSI
technology
/
Sze, S. M.
1988
Subject (ZB):
“
...VLSI
technology
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 3
3
Book
Tungsten and other refractory metals for VLSI applications. 1 : Workshop on tungsten and other refractory metals for VLSI applications. 1985: proceedings : Workshop on tungsten and...
Blewer, R. S.
1986
Subject (ZB):
“
...VLSI
technology
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
/* Narrow Search Options */ ?>
Back
Narrow Search Results
Available as
Print Edition
3
Material Type
Book
3
Type of Literature
Conference Publication
1
Year of Publication
From:
To:
Location
IFF
ZB
IBN-1-2
1
Name
Blewer, R. S.
1
Sze, S. M.
1
Tauber, Richard N.
1
Wolf, Stanley.
1
Subject
VLSI technology
integrated circuit
1
metallization
1
microelectronics
1
silicon
1
tungsten
1
Classification
FGM - Microelectronic technology
2
FGMH - Metallization, physics of microelectronics
1
FMT - Refractory metals, refractory alloys
1
/* End Narrow Search Options */ ?>
×
Loading...