1
Silicon processing for the VLSI era. 1. Process technology /
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Subject (ZB): “...VLSI technology...”
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VLSI technology /
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Sze, S. M.
1988
Subject (ZB): “...VLSI technology...”
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Tungsten and other refractory metals for VLSI applications. 1 : Workshop on tungsten and other refractory metals for VLSI applications. 1985: proceedings : Workshop on tungsten and other refractory metals for VLSI applications. 1984: proceedings : Albuquerque, NM, 07.10.85-09.10.85 ; 12.11.84-13.11.84.
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Subject (ZB): “...VLSI technology...”
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