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evolution
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thin film technology
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thin film technology
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Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
Subject (ZB):
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...thin film
technology
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Srolovitz, D. J.
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Monte Carlo method
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computer simulation
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evolution
grain boundary
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grain growth
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growth
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ion implantation
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modeling
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molecular dynamics
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plasma etching
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plasma processing
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semiconducting film
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simulation
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sputtering
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surface diffusion
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texture
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FGK - Thin film technology, epitaxy
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